SEMICON Southeast Asia 2026
●Dates：May 5th(Tue) – 7th(Thu),2026
●Time ：10:00～17:00（Until 4pm on 7th）
●Venue ：Malaysia International Trade and Exhibition Centre(MITEC)
●Booth No. ：1386
●Register：Click here for registration

Exhibition items

Fine System Equipment Supporting the Semiconductor Market

●Dry Fine system that contributes to ultra precise control of gases including inert gases
●Wet fine system that offers super clean control for chemical liquid, pure water, and slurries
●High vacuum control components that enables high precision exhaust and pressure control for chambers, etc.

• High-durability process gas valve for high temperatures AGD Series
• Air operated valve for chemical liquids AMD※※3R Series
• Air operated valve for high vacuum AVB Series

Products compatible with medium and post processing are also available

●A diverse range of electric motion components that contribute to automation needs

• Electric actuator with built-in Controllers Guided LRXG-STG Series
• Electric Actuator with Built-in Controller Slider type LRXE-BS Series
• Multi-axis controller ECMG Series
• Electric actuator Guided type　DSTS Series

　　　　

• τDISC Standard type ND-s Series

●Proprietary activated carbon filter realizes high removal performance of 99% or more

• Siloxane/Ozone Remover　SFX Series

●Nitrogen gas can be easily extracted from compressed air

• Nitrogen gas extraction unit NS・NSU Series

●Precise positioning of fine parts and load control are possible

• High precision spherical tracking: Aerostatic Bearing Air Gyro【Special-order product】 LBC-R Series

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