Product Details

Filters

Siloxane/Ozone Remover

Model No.
SFX

NEW

This remover is specialized for the adsorption and ozone decomposition of siloxane.
The high removal rate of 99% allows compressed air and nitrogen gas to be used under pressure and at high flow rates.

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation

Add to Favourites

Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

  • Features
  • Variations

[Two types of contaminants removed with one unit]
The activated carbon element removes siloxane and ozone in a single unit.

[Supports high pressure/large flow rates]
Compressed air and nitrogen gas can be used at high flow rates while under pressure.

[High removal rate]
More than 99% siloxane adsorption and ozone decomposition performance.

[Space saving]
Modular connection to CKD preparation components enable reduced piping.

Model No. Product name Connection processAmbient and Fluid temperatures Remarks
SFX40-8Siloxane/Ozone RemoverRc1/45~50℃
SFX40-10Siloxane/Ozone RemoverRc3/85~50℃
SFX40-15Siloxane/Ozone RemoverRc1/25~50℃

Return to Product List