SEMICON Korea 2026
●Dates ：Feburuary 11th (Wednesday) – February 13th (Friday), 2025
●Time ：10：00～17：00（Unitl 16:00 on 13th)
●Venue ：Coex (Korea・Seoul)
●Booth No. ：C316
●Register :Click here for registration

Exhibition items

Fine System Equipment Supporting the Semiconductor Market

●Gas control
Dry Fine system that contributes to ultra precise control of gases including inert gases

• High-durability process gas valve for high temperatures AGD Series
• Regulator for process gas PGM Series
• Integrated gas supply system IAGD Series

●Chemical control
Wet fine system that offers super clean control for chemical liquid, pure water, and slurries

• Air operated valve for chemical liquids AMD※※3R Series
• Air operated valve for chemical liquids (Manifold) GAMD※※3R Series
• Air operated valve for chemical liquids Metal-free type AMD※1M Series
• Manual Valve for Chemical Liquids MMD※03RN Series
• Pilot regulator PMP Series
• Electric flow rate adjusting valve MNV Series
• Fine level switch KML Series

●Vacuum control
High vacuum control components that enables high precision exhaust and pressure control for chambers, etc.

• Air operated valve for high vacuum AVB Series
• Manual valve for high vacuum MVB Series

●A lineup of products that support post-processing, including electric motors and pneumatic components

• High precision spherical tracking: Aerostatic Bearing Air Gyro【Special-order product】 LBC-R Series
• Electric actuator　ECV Series
• Nitrogen gas extraction unit NS・NSU Series
• τDISC Standard type ND-s Series
• Direct acting 3-port valve 3QR・3QB・3QE・3QZ Series
• Directional Control Valve with Speed Control Valve【Special-order product】 MN3/4E0・MN3/4E00 Series

Improvement of the working environment

●Compact balancer reduces operator arm and hand loads　　

• Compact Arm CAW Series

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