Event
SEMICON EUROPA 2026
●Dates ：November 10th(Tue) ~ 13th (Fri), 2026
●Time ：11：00～18：00 (Last day until 16:00)
●Venue ：Messe MÜNCHEN (MÜNCHEN, Germany)
●Booth No. ：B1 B1476
●Registration：Click here for registration
Exihibition items
Fine System Equipment Supporting the Semiconductor Market
●A Dry Fine system that contributes to ultra precise control of gases including inert gases
●A wet fine system that offers super clean control for chemical liquid, pure water, and slurries
●A high vacuum control components that enables high precision exhaust and pressure control for chambers, etc.
Regulator for process gas PGM Series
High-durability process gas valve for high temperatures AGD Series
Integrated gas supply system IAGD Series
Air operated valve for chemical liquids AMD**3R Series
Pilot regulator PMP002 Series
Manual flow rate adjusting valve FMD Series
Electric flow rate adjusting valve MNV Series
Vacuum pressure control system IAVB Series
Air operated valve for high vacuum AVB Series
A lineup of products compatible with post-processing is also available
●Positioning of fine parts with precision components and load control is possible
Air bearing actuator LBC Series
High precision spherical tracking: Aerostatic Bearing Air Gyro【Special-order product】LBC-R Series
Precise suction plate PVP Series
●Experience 9 types of dangers lurking in the field with one unit
Safety x Hazard Experience Unit【Special-order product/Japan only release】SRE Series●Introducing CKD’s unique products such as various filters
Nitrogen gas extraction unit NS・NSU Series
Inline clean filter FCS Series
Siloxane/Ozone Removers SFX Series
●Ideal for management of cooling water in each manufacturing process
Integrated unit for water control WXU Series
Karman Vortex Flow Sensor FLUEREX WFK2 Series