SEMICON China 2026
●Dates ：March 25th(Wed)-27th(Fri), 2026
●Time ：09：00～17：00 (Until 16:00 on 27th)
●Venue: Shanghai New International Expo Centre (Shanghai, China)
●Booth No. ：Hall N2 2631
●Register：Click here for registration

Exhibition items

Fine System Equipment Supporting the Semiconductor Market

●Gas Control
Dry Fine system that contributes to ultra precise control of gases including inert gases

• High-durability process gas valve for high temperatures AGD Series
• Regulator for process gas PGM Series
• Integrated gas supply system IAGD Series

●Chemical Control
Wet fine system that offers super clean control for chemical liquid, pure water, and slurries

• Air operated valve for chemical liquids AMD※※3R Series
• Air operated valve (manifold) GAMD※※3R Series
• Air operated valve for chemical liquids Metal-free type AMD※1M Series
• Manual Valve for Chemical Liquids MMD※03RN Series
• Pilot regulator PMP Series
• Electric flow rate adjusting valve MNV Series
• Fine level switch KML Series

●Vacuum Control
High vacuum control components that enables high precision exhaust and pressure control for chambers, etc

• Air operated valve for high vacuum AVB Series
• Manual valve for high vacuum MVB Series

●We also offer mid- and post-process compatible products, such as electric motion and pneumatic components

• τDISC High-speed rotation type ND-s HS Series
• Electric Actuator with Built-in Controller Slider type　LRXE-BS Series
• Directional control valve manifold, rear piping series 【Special-order product】　M3/4GB・M3QRB Series
• Pilot operated 3, 5-port valve Plug-in-type block manifold　TVG Series
• Remote I/O　RT Series

●CKD’s unique solution that solves the cost and risk of visual inspections of transparent objects

• Transparent Object Inspection System IS-UVCL01

Official Website