Product List

Product List

Out of 58 items,
item No. 21 to 30
Semiconductor manufacturing process

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Direct acting 3-port solenoid valves

Block manifold

Model No.
MN3Q

Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

Flow sensors / controllers

Miniature flow rate sensor for gas RAPIFLOW®

Model No.
FSM

Discontinued some variations

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Karman vortex flow rate sensor for water FLUEREX

Model No.
WFK3000

Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
  • Physicochemical analysis equipment

Flow sensors / controllers

Flow sensor for compressed air (Display separated FLUEREX)

Model No.
PFD

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Flow sensor tester kit for gas

Model No.
PFK

Discontinued some variations

Equipment for measuring the air flow rate is provided as a kit. Enables immediate measurements on site.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only

Ejector system

Ejector unit (10.3 mm width)

Model No.
VSN・VSNM

Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension es…

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

3D CAD

CKD plus Members Only

Suction pads

Precise suction plate

Model No.
PVP

High precision suction plate that adopts porous fluorine resin on the suction surface.

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Air operated valves

Air operated valve for chemical liquids

Model No.
AMD※※3R・AMG※※3R・GAMD※※3R

New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Air operated valves

Air operated valve for chemical liquids

Model No.
AMD※※2・AMG※※2・GAMD※※2・GAMD0※2A

Discontinued some variations

Standard of air operated valve for chemical liquids.
This series has the most abundant connection options for molded…

Industry
  • Semiconductor manufacturing process (pre-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Air operated valves

Air operated valve for chemical liquids (for high pressure)

Model No.
AMD※1H

It is a valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like…

Industry
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only