Product List
Product List
- Out of 61 items,
- item No. 21 to 30
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCG
A high-precision, high-rigidity wide guide has been attached. Symmetrical structure with increased flexibility in design…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Special cylinders
Air bearing actuator
- Model No.
- LBC
Air static pressure soft actuator based on non-contact air bearing mechanism with zero sliding resistance. The actuator …
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated 3, 4, 5-port valves
Master valve
- Model No.
- 4GA/BR・M4GA/BR
3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Flow sensors / controllers
Miniature flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM
Discontinued some variations
Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK3000
Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension es…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
3D CAD
CKD plus Members Only
Suction pads
Precise suction plate
- Model No.
- PVP
High precision suction plate that adopts porous fluorine resin on the suction surface.
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※3R・AMG※※3R・GAMD※※3R
New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
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- Semiconductor manufacturing process
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