Product List
Product List
- Out of 58 items,
- item No. 11 to 20
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Regulators
Pilot regulator
- Model No.
- PMP
NEW
A regulator designed to stabilize the pressure fluctuation of chemical liquids and pure water supply parts using pilot a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Digital electro pneumatic regulator
- Model No.
- EVD
NEW
Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display fu…
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pneumatic pressure sensors
Electronic pressure switch with digital display
- Model No.
- PPG
A compact 1-screen 2-color display pressure switch of □31 mm. Compatible with protection degree IP65. (Piping connection…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pneumatic pressure sensors
Digital pressure sensor
- Model No.
- PPX
A compact 2-screen 3-color display pressure sensor of □30 mm.
A digital pressure sensor enabling simultaneous confir…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCW
A basic model linear slide cylinder model featuring the specs most used by customers provided as standard.
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCR
Symmetrical structure that is drastically lighter and with increased flexibility in design. Cylinder with highly rigid l…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCG
A high-precision, high-rigidity wide guide has been attached. Symmetrical structure with increased flexibility in design…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Special cylinders
Air bearing actuator
- Model No.
- LBC
Air static pressure soft actuator based on non-contact air bearing mechanism with zero sliding resistance. The actuator …
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated 3, 4, 5-port valves
Master valve
- Model No.
- 4GA/BR・M4GA/BR
3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
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- Semiconductor manufacturing process
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