Product List
Product List
- Out of 61 items,
- item No. 11 to 20
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Compact flow rate controller RAPIFLOW®
- Model No.
- FCM
It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…
- Industry
- Shield gas
- N2 purging related products
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Regulators
Pilot regulator
- Model No.
- PMP
A regulator designed to stabilize the pressure fluctuation of chemical liquids and pure water supply parts using pilot a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Digital electro pneumatic regulator
- Model No.
- EVD
Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display fu…
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pneumatic pressure sensors
Electronic pressure switch with digital display
- Model No.
- PPG
A compact 1-screen 2-color display pressure switch of □31 mm. Compatible with protection degree IP65. (Piping connection…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pneumatic pressure sensors
Digital pressure sensor
- Model No.
- PPX
A compact 2-screen 3-color display pressure sensor of □30 mm.
A digital pressure sensor enabling simultaneous confir…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCW
A basic model linear slide cylinder model featuring the specs most used by customers provided as standard.
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCR
Symmetrical structure that is drastically lighter and with increased flexibility in design. Cylinder with highly rigid l…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
- Search Conditions
- Model No.
- Product Category
- All
- Specific Use
- All
- Industry
- Semiconductor manufacturing process
- All
- New Products Only
- Discontinued Products Only