Product List
Product List
- Out of 61 items,
- item No. 1 to 10
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3KA1
Improved wear resistance and sliding performance of sliding parts, greatly improved life and stabilized responsiveness a…
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GD/ER
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GA/BR
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Liquid level sensors
Fine level switch
- Model No.
- KML
NEW
Detects with high accuracy the level of fluids including pure water, acids, alkalis and solvents, outputting electrical …
- Industry
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
General purpose
ABSODEX
- Model No.
- AX1R・AX2R・AX4R・AXD
NEW
This rotary actuator enables accurate positioning simply by mounting a load directly without the need for a bearing or a…
- Industry
- Assembly
- Inspection
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
3, 5-port pilot operated valve
- Model No.
- 4GA/BR・M4GA/BR・MN4GA/BR
NEW
[NEW] Supported communication expanded.
3, 5-port valve with improved environmental performance, safety, reliabil…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Filters
Siloxane/Ozone Remover
- Model No.
- SFX
This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of …
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Regulator for process gas
Regulator for process gas
- Model No.
- PGM
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Electro pneumatic regulator
- Model No.
- EVS2
[NEW] Variation added
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Vacuum-related products
Compact vacuum regulator
- Model No.
- VSRVV
Discontinued some variations
Push-lock compact vacuum regulator.
- Industry
- Conveyance
- Assembly
- Handling
- Inspection
- Implementation
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
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