Product List

Product List

Out of 58 items,
item No. 41 to 50
Semiconductor manufacturing process

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Process gas components

Air operated valve

Model No.
AGD

Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

High-durability valve

High-durability process gas valve for high temperatures

Model No.
AGD

A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types a…

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

Process gas components

Manual valve for process gas

Model No.
OGD

90° rotation snap action manual valve.

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Manual valve for process gas

Model No.
MGD

Manual metal diaphragm valve. A 270° rotating handle opening/closing type.

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Vacuum generator

Model No.
VG

Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5

Industry
  • Components for chemical gas supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

High vacuum components

Vacuum pressure control system

Model No.
IAVB

While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables v…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

High vacuum components

Air operated valve for high vacuum

Model No.
AVB

With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved. <…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

High vacuum components

Manual valve for high vacuum

Model No.
MVB

A handle rotary manual valve for high vacuum.
Aluminum and SUS bodies are available.

Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

Integrated gas supply system

Integrated gas supply system

Model No.
IAGD5

A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical gas supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

CKD plus Members Only

Integrated gas supply system

Integrated gas supply system

Model No.
IAGD4

A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical gas supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

CKD plus Members Only