Product List
Product List
- Out of 67 items,
- item No. 31 to 40
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Flow sensors / controllers
Miniature flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM
Discontinued some variations
Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
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Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK3000
Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
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Technical Data
CKD plus Members Only
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension es…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Suction pads
Precise suction plate
- Model No.
- PVP
High precision suction plate that adopts porous fluorine resin on the suction surface.
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※3R・AMG※※3R・GAMD※※3R
New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※2・AMG※※2・GAMD※※2・GAMD0※2A
Discontinued some variations
Standard of air operated valve for chemical liquids.
This series has the most abundant connection options for molded…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids (for high pressure)
- Model No.
- AMD※1H
It is a valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like…
- Industry
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids Metal-free type
- Model No.
- AMD※1M
A valve designed to support strong acid (hydrochloric acid, hydrofluoric acid, nitric acid) lines in chemical liquid sup…
- Industry
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
Manual valves
Manual valve for chemical liquids
- Model No.
- MMD※※2・GMMD※※2
Standard manual valve for chemical liquids.
This series has the most abundant connection options for molded parts.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
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