Product List
Product List
- Out of 73 items,
- item No. 51 to 60
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Process gas components
Vacuum generator
- Model No.
- VG
Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5
- Industry
- Components for chemical gas supply facilities
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Regulator for process gas
Regulator for process gas
- Model No.
- PGM
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
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CKD plus Members Only
Flow sensors / controllers
Miniature flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM
Discontinued some variations
Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Flow sensors / controllers
Compact flow rate controller RAPIFLOW®
- Model No.
- FCM
It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…
- Industry
- Shield gas
- N2 purging related products
- Physicochemical analysis equipment
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
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CKD plus Members Only
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
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CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK3000
Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment
- Documents / Download
Digital Catalog
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Safety Precautions
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2D CAD
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Technical Data
CKD plus Members Only
Pneumatic pressure sensors
Digital pressure sensor
- Model No.
- PPX
A compact 2-screen 3-color display pressure sensor of □30 mm.
A digital pressure sensor enabling simultaneous confir…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pneumatic pressure sensors
Electronic pressure switch with digital display
- Model No.
- PPG
A compact 1-screen 2-color display pressure switch of □31 mm. Compatible with protection degree IP65. (Piping connection…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
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CKD plus Members Only
Vacuum-related products
Compact vacuum regulator
- Model No.
- VSRVV
Discontinued some variations
Push-lock compact vacuum regulator.
- Industry
- Conveyance
- Assembly
- Handling
- Inspection
- Implementation
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Suction pads
Precise suction plate
- Model No.
- PVP
High precision suction plate that adopts porous fluorine resin on the suction surface.
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
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- Semiconductor manufacturing process
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