Product List
Product List
- Out of 58 items,
- item No. 51 to 58
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD3
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
CKD plus Members Only
Integrated gas supply system
Clean panel
- Model No.
- FICS
CKD guarantees the design, manufacture and inspection of the unit according to the customer&…
- Industry
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
CKD plus Members Only
High precision
τDISC Large middle hole type
- Model No.
- FD-s
Increase freedom degree of machine designing (Middle hole: 52mm～150mm).
Using the durable high performance magnetic t…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
CKD plus Members Only
High precision
τDISC High rigidity type
- Model No.
- DD-s
High-rigidity type pursuing high rigidity and high precision.
Significant improvement in moment rigidity, axial rigid…
- Industry
- Inspection
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
CKD plus Members Only
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3-P70・FSM3-P80
NEW
P5* / P7* Series for cleanrooms
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance …
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate th…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK5000・WFK6000・WFK7000
Discontinued 2019 12 27
【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
User's Manual
2D CAD
3D CAD
Technical Data
CKD plus Members Only
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- Semiconductor manufacturing process
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