Product List
Product List
- Out of 67 items,
- item No. 1 to 10
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Budding products【Special-order product】
Direct acting 3-port valve【Special-order product】
- Model No.
- 3QR
NEW
Compact direct acting 3-port valve.
Special specification products compatible with continuous energization, self-hold…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Documents / Download
PDF Catalog
CKD plus Members Only
Budding products【Special-order product】
Directional control valve manifold, rear piping series 【Special-order product】
- Model No.
- M3/4GB・M3QRB
NEW
This is a manifold solenoid valve with rear piping specifications.Ideal for installation in space-saving control panels …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
CKD plus Members Only
Filters
Siloxane/Ozone Remover
- Model No.
- SFX
NEW
This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of …
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Budding products【Special-order product】
Compact solenoid proportional valve【Special-order product】
- Model No.
- 3QB
A proportional solenoid valve that controls flow rate in proportion to the electric current.
Ultra-compact 10 mm widt…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
PDF Catalog
CKD plus Members Only
Budding products【Special-order product】
Electric Actuator Motorless Specification Slider 【Special specifications】
- Model No.
- EFS
NEW
Thin, lightweight electric actuator. Contributes to the downsizing and weight reduction of equipment. The black body col…
- Industry
- Inspection
- Handling
- Implementation
- Conveyance
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
2D CAD
CKD plus Members Only
Tool Changer
Auto Tool Changer
- Model No.
- KHBC
NEW
End-of-arm tools can be automatically changed by the robot itself. Supports robots of various sizes from small to large,…
- Industry
- Handling
- Semiconductor manufacturing process (post-process)
- Conveyance
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3KA1
Improved wear resistance and sliding performance of sliding parts, greatly improved life and stabilized responsiveness a…
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GD/ER
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
3-port pilot operated valve
- Model No.
- 3GA/BR
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Liquid level sensors
Fine level switch
- Model No.
- KML
NEW
Detects with high accuracy the level of fluids including pure water, acids, alkalis and solvents, outputting electrical …
- Industry
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
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- Semiconductor manufacturing process
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