Product List
Product List
- Out of 35 items,
- item No. 31 to 35
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3-P70・FSM3-P80
NEW
P5* / P7* Series for cleanrooms
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance …
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate th…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK5000・WFK6000・WFK7000
Discontinued 2019 12 27
【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
User's Manual
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Flow sensor tester kit for gas
- Model No.
- PFK
Discontinued 2022 03 31
【Discontinued model】
Alternative model: None
Equipment for measuring the air flow rate is provided as a kit. Enabl…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Search Conditions
- Model No.
- Product Category
- All
- Specific Use
- All
- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
- New Products Only
- Discontinued Products Only