Product List
Product List
- Out of 33 items,
- item No. 31 to 33
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate th…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)

- Documents / Download
PDF Catalog
CKD plus Members Only
Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK5000・WFK6000・WFK7000
Discontinued 2019 12 27
【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment

- Documents / Download
PDF Catalog
User's Manual
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Flow sensor tester kit for gas
- Model No.
- PFK
Discontinued 2022 03 31
【Discontinued model】
Alternative model: None
Equipment for measuring the air flow rate is provided as a kit. Enabl…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
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- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
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