Product List
Product List
- Out of 43 items,
- item No. 31 to 40
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Suction pads
Precise suction plate
- Model No.
- PVP
High precision suction plate that adopts porous fluorine resin on the suction surface.
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension es…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Special cylinders
Air bearing actuator
- Model No.
- LBC
Air static pressure soft actuator based on non-contact air bearing mechanism with zero sliding resistance. The actuator …
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Budding products【Special-order product】
ABSODEX waterproof/dust-proof【Special specifications】
- Model No.
- AX8R
This actuator is ideal for rotation positioning in environments with high levels of water drops or dust.
Degree of pr…
- Industry
- Assembly
- Inspection
- Implementation
- Dental equipment
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
CKD plus Members Only
Budding products【Special-order product】
Electric Actuator Motorless Specification Slider 【Special specifications】
- Model No.
- EFS
NEW
Thin, lightweight electric actuator. Contributes to the downsizing and weight reduction of equipment. The black body col…
- Industry
- Inspection
- Handling
- Implementation
- Conveyance
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3-port valves
FP* Series for Food manufacturing processes 3-port pilot operated valve
- Model No.
- 3GA/BR-FP1
FP* Series for food manufacturing processes
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
Pilot operated 3-port valves
P4* Series for Rechargeable battery manufacturing processes 3-port pilot operated valve
- Model No.
- 3GD/ER-P4
P4* Series for rechargeable battery manufacturing processes
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
Pilot operated 3-port valves
P4* Series for Rechargeable battery manufacturing processes 3-port pilot operated valve
- Model No.
- 3GA/BR-P4
P4* Series for rechargeable battery manufacturing processes
3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …
- Industry
- Assembly
- Semiconductor manufacturing process (post-process)
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3-P70・FSM3-P80
NEW
P5* / P7* Series for cleanrooms
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance …
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
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