Product List

Product List

Out of 33 items,
item No. 31 to 33
Semiconductor manufacturing process
Semiconductor manufacturing process (post-process)

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Flow sensors / controllers

Pneumatic flow rate sensor (integrated display FLUEREX)

Model No.
PF・PFU

Discontinued 2019 03 31

【Discontinued model】
Alternative model : PFD Series

Pneumatic flow rate sensor for medium / large flow rate th…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

CKD plus Members Only

Flow sensors / controllers

Karman vortex flow rate sensor for water FLUEREX

Model No.
WFK5000・WFK6000・WFK7000

Discontinued 2019 12 27

【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
  • Physicochemical analysis equipment
Documents / Download

PDF Catalog

User's Manual

2D CAD

3D CAD

Technical Data

CKD plus Members Only

Flow sensors / controllers

Flow sensor tester kit for gas

Model No.
PFK

Discontinued 2022 03 31

【Discontinued model】
Alternative model: None
Equipment for measuring the air flow rate is provided as a kit. Enabl…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only