Product List
Product List
- Out of 33 items,
- item No. 21 to 30
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension es…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
3D CAD
CKD plus Members Only
Suction pads
Precise suction plate
- Model No.
- PVP
High precision suction plate that adopts porous fluorine resin on the suction surface.
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
High vacuum components
Vacuum pressure control system
- Model No.
- IAVB
While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables v…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
High vacuum components
Air operated valve for high vacuum
- Model No.
- AVB
With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved. <…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
High vacuum components
Manual valve for high vacuum
- Model No.
- MVB
A handle rotary manual valve for high vacuum.
Aluminum and SUS bodies are available.
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
High precision
τDISC Large middle hole type
- Model No.
- FD-s
Increase freedom degree of machine designing (Middle hole: 52mm～150mm).
Using the durable high performance magnetic t…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
CKD plus Members Only
High precision
τDISC High rigidity type
- Model No.
- DD-s
High-rigidity type pursuing high rigidity and high precision.
Significant improvement in moment rigidity, axial rigid…
- Industry
- Inspection
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
CKD plus Members Only
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3-P70・FSM3-P80
NEW
P5* / P7* Series for cleanrooms
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance …
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
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