Product List

Product List

Out of 33 items,
item No. 11 to 20
Semiconductor manufacturing process
Semiconductor manufacturing process (post-process)

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Pneumatic pressure sensors

Electronic pressure switch with digital display

Model No.
PPG

A compact 1-screen 2-color display pressure switch of □31 mm. Compatible with protection degree IP65. (Piping connection…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Pneumatic pressure sensors

Digital pressure sensor

Model No.
PPX

A compact 2-screen 3-color display pressure sensor of □30 mm.
A digital pressure sensor enabling simultaneous confir…

Industry
  • Semiconductor manufacturing process (post-process)

Direct acting 3-port solenoid valves

Direct acting 3-port valve

Model No.
3QR・3QB・3QE・3QZ

Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)
  • Oxygen concentrator
  • Dialysis monitoring equipment
  • Dental equipment

Cylinders with linear guide

Linear slide cylinder

Model No.
LCW

A basic model linear slide cylinder model featuring the specs most used by customers provided as standard.

Industry
  • Semiconductor manufacturing process (post-process)
  • Assembly
Documents / Download

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Cylinders with linear guide

Linear slide cylinder

Model No.
LCR

Symmetrical structure that is drastically lighter and with increased flexibility in design. Cylinder with highly rigid l…

Industry
  • Semiconductor manufacturing process (post-process)
  • Assembly
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Cylinders with linear guide

Linear slide cylinder

Model No.
LCG

A high-precision, high-rigidity wide guide has been attached. Symmetrical structure with increased flexibility in design…

Industry
  • Semiconductor manufacturing process (post-process)
  • Assembly
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Special cylinders

Air bearing actuator

Model No.
LBC

Air static pressure soft actuator based on non-contact air bearing mechanism with zero sliding resistance. The actuator …

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation
Documents / Download

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Air operated 3, 4, 5-port valves

Master valve

Model No.
4GA/BR・M4GA/BR

3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…

Industry
  • Assembly
  • Air pressure supply
  • Purified water production
  • Adjustment
  • Filtration
  • Bag manufacturing (for infusion bags)
  • Filling
  • Sterilization (autoclave)
  • Packaging
  • Tableting
  • Cultivation
  • Sorting
  • Sterilizing equipment
  • Physicochemical analysis equipment
  • Semiconductor manufacturing process (post-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Miniature flow rate sensor for gas RAPIFLOW®

Model No.
FSM

Discontinued some variations

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Karman vortex flow rate sensor for water FLUEREX

Model No.
WFK3000

Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
  • Physicochemical analysis equipment