Product List
Product List
- Out of 43 items,
- item No. 11 to 20
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
High precision
τDISC Large middle hole type
- Model No.
- FD-s
Increase freedom degree of machine designing (Middle hole: 52mm～150mm).
Using the durable high performance magnetic t…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
User's Manual
2D CAD
CKD plus Members Only
High precision
τDISC High rigidity type
- Model No.
- DD-s
High-rigidity type pursuing high rigidity and high precision.
Significant improvement in moment rigidity, axial rigid…
- Industry
- Inspection
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCW
A basic model linear slide cylinder model featuring the specs most used by customers provided as standard.
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCR
Symmetrical structure that is drastically lighter and with increased flexibility in design. Cylinder with highly rigid l…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Cylinders with linear guide
Linear slide cylinder
- Model No.
- LCG
A high-precision, high-rigidity wide guide has been attached. Symmetrical structure with increased flexibility in design…
- Industry
- Semiconductor manufacturing process (post-process)
- Assembly
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
3, 5-port pilot operated valve
- Model No.
- 4GA/BR・M4GA/BR・MN4GA/BR
[NEW] Supported communication expanded.
3, 5-port valve with improved environmental performance, safety, reliabil…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Air operated 3, 4, 5-port valves
Master valve
- Model No.
- 4GA/BR・M4GA/BR
3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Digital electro-pneumatic regulator
- Model No.
- EVD
Compact, high-function electro-pneumatic regulator featuring easily used functions such as pressure and error display fu…
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (post-process)
- New Products Only
- Discontinued Products Only