Product List

Product List

Out of 33 items,
item No. 1 to 10
Semiconductor manufacturing process
Semiconductor manufacturing process (post-process)

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Pilot operated 3-port valves

3-port pilot operated valve

Model No.
3KA1

Improved wear resistance and sliding performance of sliding parts, greatly improved life and stabilized responsiveness a…

Industry
  • Assembly
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

3D CAD

CKD plus Members Only

Pilot operated 3-port valves

3-port pilot operated valve

Model No.
3GD/ER

3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …

Industry
  • Assembly
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

3D CAD

CKD plus Members Only

Pilot operated 3-port valves

3-port pilot operated valve

Model No.
3GA/BR

3-port valve with improved environmental performance, safety, reliability, and ease of use. High-function.
[Cylinder …

Industry
  • Assembly
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

3D CAD

CKD plus Members Only

General purpose

ABSODEX

Model No.
AX1R・AX2R・AX4R・AXD

NEW

This rotary actuator enables accurate positioning simply by mounting a load directly without the need for a bearing or a…

Industry
  • Assembly
  • Inspection
  • Semiconductor manufacturing process (post-process)

Pilot operated 3, 4, 5-port solenoid valves

3, 5-port pilot operated valve

Model No.
4GA/BR・M4GA/BR・MN4GA/BR

NEW

[NEW] Supported communication expanded.

3, 5-port valve with improved environmental performance, safety, reliabil…

Industry
  • Assembly
  • Air pressure supply
  • Purified water production
  • Adjustment
  • Filtration
  • Bag manufacturing (for infusion bags)
  • Filling
  • Sterilization (autoclave)
  • Packaging
  • Tableting
  • Cultivation
  • Sorting
  • Sterilizing equipment
  • Physicochemical analysis equipment
  • Semiconductor manufacturing process (post-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

Filters

Siloxane/Ozone Remover

Model No.
SFX

This remover is dedicated for the adsorption of siloxane and the decomposition of ozone.
With a high removal rate of …

Industry
  • Semiconductor manufacturing process (post-process)
  • Implementation
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Electro pneumatic regulators

Electro pneumatic regulator

Model No.
EVS2

[NEW] Variation added
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for…

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Vacuum-related products

Compact vacuum regulator

Model No.
VSRVV

Discontinued some variations

Push-lock compact vacuum regulator.

Industry
  • Conveyance
  • Assembly
  • Handling
  • Inspection
  • Implementation
  • Semiconductor manufacturing process (post-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

3D CAD

CKD plus Members Only

Flow sensors / controllers

Compact Flow Rate Sensor RAPIFLOW®

Model No.
FSM3

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…

Industry
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products

Electro pneumatic regulators

Digital electro pneumatic regulator

Model No.
EVD

Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display fu…

Industry
  • Semiconductor manufacturing process (post-process)
  • Special purpose / conveyance