A new variation of valve for process gas that uses a metal diaphragm.
It has been released as a general-purpose prod…

Industry

• Components for chemical gas supply facilities
• Components for chemical liquid supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products

Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…

Industry

• Components for chemical gas supply facilities
• Components for chemical liquid supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products

A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types a…

Industry

• Components for chemical liquid supply facilities
• Components for chemical gas supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products

90° rotation snap action manual valve.

Industry

• Components for chemical gas supply facilities
• Components for chemical liquid supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products

Manual metal diaphragm valve. A 270° rotating handle opening/closing type.

Industry

• Components for chemical liquid supply facilities
• Components for chemical gas supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products

Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5

Industry

• Components for chemical gas supply facilities

While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables v…

Industry

• Semiconductor manufacturing process (pre-process)
• Semiconductor manufacturing process (post-process)

With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved. <…

Industry

• Semiconductor manufacturing process (pre-process)
• Semiconductor manufacturing process (post-process)

A handle rotary manual valve for high vacuum.
Aluminum and SUS bodies are available.

Industry

• Semiconductor manufacturing process (pre-process)
• Semiconductor manufacturing process (post-process)

A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …

Industry

• Semiconductor manufacturing process (pre-process)
• Components for chemical gas supply facilities