Product List
Product List
- Out of 16 items,
- item No. 1 to 10
- Semiconductor manufacturing process
- Components for chemical liquid supply facilities
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Pilot operated 3, 4, 5-port solenoid valves
3, 5-port pilot operated valve
- Model No.
- 4GA/BR・M4GA/BR・MN4GA/BR
NEW
[NEW] Supported communication expanded.
3, 5-port valve with improved environmental performance, safety, reliabil…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products

- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Regulator for process gas
Regulator for process gas
- Model No.
- PGM
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities

- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products

- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Air operated 3, 4, 5-port valves
Master valve
- Model No.
- 4GA/BR・M4GA/BR
3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products

- Documents / Download
Digital Catalog
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※3R・AMG※※3R・GAMD※※3R
New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids (for high pressure)
- Model No.
- AMD※1H
It is a valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like…
- Industry
- Components for chemical liquid supply facilities

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids Metal-free type
- Model No.
- AMD※1M
A valve designed to support strong acid (hydrochloric acid, hydrofluoric acid, nitric acid) lines in chemical liquid sup…
- Industry
- Components for chemical liquid supply facilities

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
Manual valves
Manual valve for chemical liquids
- Model No.
- MMD※※2・GMMD※※2
Standard manual valve for chemical liquids.
This series has the most abundant connection options for molded parts.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Manual valves
Manual valve for chemical liquids (for liquid supply)
- Model No.
- MMD※0H
A valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like in se…
- Industry
- Components for chemical liquid supply facilities

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Components for chemical liquid supply facilities
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