Product List

Product List

Out of 16 items,
item No. 1 to 10
Semiconductor manufacturing process
Components for chemical liquid supply facilities

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Pilot operated 3, 4, 5-port solenoid valves

3, 5-port pilot operated valve

Model No.
4GA/BR・M4GA/BR・MN4GA/BR

NEW

[NEW] Supported communication expanded.

3, 5-port valve with improved environmental performance, safety, reliabil…

Industry
  • Assembly
  • Air pressure supply
  • Purified water production
  • Adjustment
  • Filtration
  • Bag manufacturing (for infusion bags)
  • Filling
  • Sterilization (autoclave)
  • Packaging
  • Tableting
  • Cultivation
  • Sorting
  • Sterilizing equipment
  • Physicochemical analysis equipment
  • Semiconductor manufacturing process (post-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

Regulator for process gas

Regulator for process gas

Model No.
PGM

NEW

CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
Documents / Download

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Pilot operated 3, 4, 5-port solenoid valves

PLC-compatible block manifold

Model No.
MN3E・MN4E

More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

Air operated 3, 4, 5-port valves

Master valve

Model No.
4GA/BR・M4GA/BR

3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…

Industry
  • Assembly
  • Air pressure supply
  • Purified water production
  • Adjustment
  • Filtration
  • Bag manufacturing (for infusion bags)
  • Filling
  • Sterilization (autoclave)
  • Packaging
  • Tableting
  • Cultivation
  • Sorting
  • Sterilizing equipment
  • Physicochemical analysis equipment
  • Semiconductor manufacturing process (post-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Direct acting 3-port solenoid valves

Block manifold

Model No.
MN3Q

Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

Air operated valves

Air operated valve for chemical liquids

Model No.
AMD※※3R・AMG※※3R・GAMD※※3R

New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Air operated valves

Air operated valve for chemical liquids (for high pressure)

Model No.
AMD※1H

It is a valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like…

Industry
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

Air operated valves

Air operated valve for chemical liquids Metal-free type

Model No.
AMD※1M

A valve designed to support strong acid (hydrochloric acid, hydrofluoric acid, nitric acid) lines in chemical liquid sup…

Industry
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

Manual valves

Manual valve for chemical liquids

Model No.
MMD※※2・GMMD※※2

Standard manual valve for chemical liquids.
This series has the most abundant connection options for molded parts.

Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Manual valves

Manual valve for chemical liquids (for liquid supply)

Model No.
MMD※0H

A valve designed to support high pressure and high back pressure in chemical liquid supply facilities and the like in se…

Industry
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only