High vacuum components
Air operated valve for high vacuum
- Model No.
With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved.
High vacuum valve with high reliability and ease of use.
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
[Long life / high durability] (Part 7 Series)
A standard model with a long service life and improved usability thanks to its unique structure.
It is highly durable thanks to the optimized shape of the molded bellows.
Lightweight with aluminum body.
Unprecedented durability with the actual value of 3 million times (under our regulated conditions).
[Increased flexibility in installation and piping] (Part 7 Series)
The operation port can be set at any position in 4 directions.
Ultra-compact switches for detecting the operating position can be mounted on all four sides.
[Long life / low dust generation] (Part 3 Series)
The bulge-integrated molding method creates a streamlined flow path and smooth surfaces, and prevents gas accumulation.
Molded bellows with long service life.
|Model No.||Product name||Connection||Actuation||Body||Remarks|
|AVB※17||Molded bellows method||NW16, 25, 40, 50, 63, 80||NC||Aluminum body|
|AVB※47||Molded bellows method||NW25, 40, 50, 63||Two-stage||Aluminum body|
|AVB※37||Molded bellows method||NW16, 25, 40, 50, 63, 80, 100||Double acting||Aluminum body|
|AVB※13||Molded bellows method||NW25, 40, 50, 80||NC||Stainless steel body|
|AVB※23||Molded bellows method||NW25, 40, 50, 80||NO||Stainless steel body|
|AVB※33||Molded bellows method||NW25, 40, 50, 80||Double acting||Stainless steel body|
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