Product Details

High vacuum components

Air operated valve for high vacuum

Model No.

With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved.
High vacuum valve with high reliability and ease of use.

  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

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  • Features
  • Variations

[Long life / high durability] (Part 7 Series)
A standard model with a long service life and improved usability thanks to its unique structure.
It is highly durable thanks to the optimized shape of the molded bellows.
Lightweight with aluminum body.
Unprecedented durability with the actual value of 3 million times (under our regulated conditions).

[Increased flexibility in installation and piping] (Part 7 Series)
The operation port can be set at any position in 4 directions.
Ultra-compact switches for detecting the operating position can be mounted on all four sides.

[Long life / low dust generation] (Part 3 Series)
The bulge-integrated molding method creates a streamlined flow path and smooth surfaces, and prevents gas accumulation.
Molded bellows with long service life.
SUS body.

Model No. Product name ConnectionActuationBody Remarks
AVB※17Molded bellows methodNW16, 25, 40, 50, 63, 80NCAluminum body
AVB※47Molded bellows methodNW25, 40, 50, 63Two-stageAluminum body
AVB※37Molded bellows methodNW16, 25, 40, 50, 63, 80, 100Double actingAluminum body
AVB※13Molded bellows methodNW25, 40, 50, 80NCStainless steel body
AVB※23Molded bellows methodNW25, 40, 50, 80NOStainless steel body
AVB※33Molded bellows methodNW25, 40, 50, 80Double actingStainless steel body

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