Product List

Product List

Out of 16 items,
item No. 11 to 16
Semiconductor manufacturing process
Components for chemical liquid supply facilities

Digital Catalog

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Manual valves

Manual valve for chemical liquids Metal-free type

Model No.
MMD※0M

A valve designed to support strong acid (hydrochloric acid, hydrofluoric acid, nitric acid) lines in chemical liquid sup…

Industry
  • Components for chemical liquid supply facilities
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

Process gas components

Valve for process gas

Model No.
LGD

A new variation of valve for process gas that uses a metal diaphragm.
It has been released as a general-purpose prod…

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Air operated valve

Model No.
AGD

Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

High-durability valve

High-durability process gas valve for high temperatures

Model No.
AGD

A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types a…

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

CKD plus Members Only

Process gas components

Manual valve for process gas

Model No.
OGD

90° rotation snap action manual valve.

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Manual valve for process gas

Model No.
MGD

Manual metal diaphragm valve. A 270° rotating handle opening/closing type.

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products