Product List
Product List
- Out of 26 items,
- item No. 21 to 26
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
High vacuum components
Air operated valve for high vacuum
- Model No.
- AVB
With the special structure using CKD's unique molded bellows, a long drive life and high durability are achieved. <…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
High vacuum components
Manual valve for high vacuum
- Model No.
- MVB
A handle rotary manual valve for high vacuum.
Aluminum and SUS bodies are available.
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD5
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD4
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD3
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
CKD plus Members Only
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance …
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
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- Discontinued Products Only