Product List
Product List
- Out of 29 items,
- item No. 1 to 10
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Budding products【Special-order product】
Direct acting 3-port valve【Special-order product】
- Model No.
- 3QR
NEW
Compact direct acting 3-port valve.
Special specification products compatible with continuous energization, self-hold…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Documents / Download
PDF Catalog
CKD plus Members Only
Budding products【Special-order product】
Directional control valve manifold, rear piping series 【Special-order product】
- Model No.
- M3/4GB・M3QRB
NEW
This is a manifold solenoid valve with rear piping specifications.Ideal for installation in space-saving control panels …
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
CKD plus Members Only
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Manual valves
Manual valve for chemical liquids
- Model No.
- MMD※※2・GMMD※※2
Standard manual valve for chemical liquids.
This series has the most abundant connection options for molded parts.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Flow rate adjusting valves
Manual flow rate adjusting valve
- Model No.
- FMD00
Manual flow rate adjusting valve (needle valve).
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
Flow rate adjusting valves
Electric flow rate adjusting valve
- Model No.
- MNV
Electric flow rate adjusting valve (needle valve).
The set flow rate can be remotely adjusted.
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Liquid level sensors
Fine level switch
- Model No.
- KML
NEW
Detects with high accuracy the level of fluids including pure water, acids, alkalis and solvents, outputting electrical …
- Industry
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Regulators
Manual regulator
- Model No.
- PYM・PMM
Discontinued some variations
A manual regulator for controlling the pressure of pure water, etc.
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
3D CAD
CKD plus Members Only
- Search Conditions
- Model No.
- Product Category
- All
- Specific Use
- All
- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
- New Products Only
- Discontinued Products Only