Product List
Product List
- Out of 26 items,
- item No. 1 to 10
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Liquid level sensors
Fine level switch
- Model No.
- KML
NEW
Detects with high accuracy the level of fluids including pure water, acids, alkalis and solvents, outputting electrical …
- Industry
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Regulator for process gas
Regulator for process gas
- Model No.
- PGM
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Regulators
Pilot regulator
- Model No.
- PMP
A regulator designed to stabilize the pressure fluctuation of chemical liquids and pure water supply parts using pilot a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※3R・AMG※※3R・GAMD※※3R
New standard of air operated valve for chemical liquids.
It is a high end product that supports a wide range of pres…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Air operated valves
Air operated valve for chemical liquids
- Model No.
- AMD※※2・AMG※※2・GAMD※※2・GAMD0※2A
Discontinued some variations
Standard of air operated valve for chemical liquids.
This series has the most abundant connection options for molded…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Manual valves
Manual valve for chemical liquids
- Model No.
- MMD※※2・GMMD※※2
Standard manual valve for chemical liquids.
This series has the most abundant connection options for molded parts.
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Drip prevention valves
Air operated valve / Drip prevention valve integrated
- Model No.
- AMDS
It has a compact structure that ensures draining and controls the drip prevention with high precision. It can be used to…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- Semiconductor manufacturing process (pre-process)
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