Product List

Product List

Out of 19 items,
item No. 11 to 19

Flow sensors / controllers

Flow sensor tester kit for gas

Model No.
PFK

Discontinued some variations

Equipment for measuring the air flow rate is provided as a kit. Enables immediate measurements on site.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only

Flow sensors / controllers

P4* Series for Rechargeable battery manufacturing processes Compact flow rate sensor for gas RAPIFLOW®

Model No.
FSM2

Discontinued some variations

P4* Series for rechargeable battery manufacturing processes

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A s…

Industry
Documents / Download

PDF Catalog

Safety Precautions

CKD plus Members Only

Flow sensors / controllers

P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®

Model No.
FSM3-P70・FSM3-P80

NEW

P5* / P7* Series for cleanrooms

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…

Industry
  • Semiconductor manufacturing process (post-process)

Flow sensors / controllers

P5* / P7* Series for Cleanrooms Compact flow rate sensor for gas RAPIFLOW®

Model No.
FSM2

Discontinued some variations

P5* / P7* Series for cleanrooms

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A s…

Industry
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

CKD plus Members Only

Flow sensors / controllers

P5* / P7* Series for Cleanrooms Miniature flow rate sensor for gas RAPIFLOW®

Model No.
FSM-VFM

P5* / P7* Series for cleanrooms

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

CKD plus Members Only

Flow sensors / controllers

Flow rate sensor monitor

Model No.
WM

Discontinued 2010 11 30

【Discontinued model】
Alternative model : WFK Series

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

Flow sensors / controllers

Flow rate sensor for water

Model No.
WF※000

Discontinued 2011 02 28

【Discontinued model】
Alternative model : WFK Series

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

Flow sensors / controllers

Pneumatic flow rate sensor (integrated display FLUEREX)

Model No.
PF・PFU

Discontinued 2019 03 31

【Discontinued model】
Alternative model : PFD Series

Pneumatic flow rate sensor for medium / large flow rate th…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

CKD plus Members Only

Flow sensors / controllers

Karman vortex flow rate sensor for water FLUEREX

Model No.
WFK5000・WFK6000・WFK7000

Discontinued 2019 12 27

【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
  • Physicochemical analysis equipment
Documents / Download

PDF Catalog

User's Manual

2D CAD

3D CAD

Technical Data

CKD plus Members Only