Product List
Product List
- Out of 19 items,
- item No. 11 to 19
Flow sensors / controllers
P4* Series for Rechargeable battery manufacturing processes Compact flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM2
Discontinued some variations
P4* Series for rechargeable battery manufacturing processes
【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.
A s…
- Industry

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Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3-P70・FSM3-P80
NEW
P5* / P7* Series for cleanrooms
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Semiconductor manufacturing process (post-process)

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2D CAD
CKD plus Members Only
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM2
Discontinued some variations
P5* / P7* Series for cleanrooms
【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.
A s…
- Industry

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
Flow sensors / controllers
P5* / P7* Series for small size flow rate sensor RAPIFLOW Miniature inline filter
- Model No.
- FSM-VFM
P5* / P7* Series for cleanrooms
Miniature flow sensor for compressed air and nitrogen gas. Due to the small inner volume, the high-speed response at suc…
- Industry

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Flow sensors / controllers
Flow rate sensor monitor
- Model No.
- WM
Discontinued 2010 11 30
【Discontinued model】
Alternative model : WFK Series
- Industry

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Flow sensors / controllers
Flow rate sensor for water
- Model No.
- WF※000
Discontinued 2011 02 28
【Discontinued model】
Alternative model : WFK Series
- Industry

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Flow sensors / controllers
Pneumatic flow rate sensor (integrated display FLUEREX)
- Model No.
- PF・PFU
Discontinued 2019 03 31
【Discontinued model】
Alternative model : PFD Series
Pneumatic flow rate sensor for medium / large flow rate th…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)

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Flow sensors / controllers
Karman vortex flow rate sensor for water FLUEREX
- Model No.
- WFK5000・WFK6000・WFK7000
Discontinued 2019 12 27
【Discontinued model】
Karman vortex detection flow rate sensor for water.
Alternative model : Karman vortex flow ra…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
- Physicochemical analysis equipment

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2D CAD
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Technical Data
CKD plus Members Only
Flow sensors / controllers
Flow sensor tester kit for gas
- Model No.
- PFK
Discontinued 2022 03 31
【Discontinued model】
Alternative model: None
Equipment for measuring the air flow rate is provided as a kit. Enabl…
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
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