With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.

Industry

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…

Industry

• Shield gas
• Semiconductor manufacturing process (post-process)
• N2 purging related products

Received the 2018 Good Design Award.
Karman vortex flow sensor that covers 0.4 to 250 L/min. Switch setting for vario…

Industry

• Physicochemical analysis equipment

It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…

Industry

• Shield gas
• N2 purging related products
• Physicochemical analysis equipment

Flow rate sensor with Flo-Thru structure. No clogging of foreign matter or detection error will occur. It is ideal for s…

Industry

• Cooling water
• Environmental durability
• Coolant control

Integrated unit that integrates the flow sensor and valve in cooling water circulation circuits. It greatly reduces the …

Industry

• Physicochemical analysis equipment

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A s…

Industry

• Shield gas
• Inspection
• Physicochemical analysis equipment

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry

• Semiconductor manufacturing process (post-process)

Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.

Industry

• Sensor
• Semiconductor manufacturing process (post-process)
• Physicochemical analysis equipment

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

Industry

• Sensor
• Semiconductor manufacturing process (post-process)