Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5

Industry

• Components for chemical gas supply facilities

CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…

Industry

• Semiconductor manufacturing process (pre-process)
• Components for chemical liquid supply facilities

This compact compressor can easily supply clean air to places where compressed air cannot be obtained using only a 100VA…

Industry

It easily separates and purifies the high-purity nitrogen necessary for oxidation-proof and explosion-proof applications…

Industry

• Shield gas
• Implementation
• Packaging
• Filling

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry

• Semiconductor manufacturing process (post-process)

It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…

Industry

• Shield gas
• N2 purging related products
• Physicochemical analysis equipment

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

Industry

• Sensor
• Semiconductor manufacturing process (post-process)

Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.

Industry

• Sensor
• Semiconductor manufacturing process (post-process)
• Physicochemical analysis equipment

Flow rate sensor with Flo-Thru structure. No clogging of foreign matter or detection error will occur. It is ideal for s…

Industry

• Cooling water
• Environmental durability
• Coolant control

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A s…

Industry

• Shield gas
• Inspection
• Physicochemical analysis equipment