Product List

Product List

Out of 13 items,
item No. 11 to 13
Semiconductor manufacturing process
N2 purging related products

We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.

Process gas components

Manual valve for process gas

Model No.
OGD

90° rotation snap action manual valve.

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Manual valve for process gas

Model No.
MGD

Manual metal diaphragm valve. A 270° rotating handle opening/closing type.

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Flow sensors / controllers

Compact flow rate controller RAPIFLOW®

Model No.
FCM

It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…

Industry
  • Shield gas
  • N2 purging related products
  • Physicochemical analysis equipment