Product List
Product List
- Out of 13 items,
- item No. 1 to 10
- Semiconductor manufacturing process
- N2 purging related products
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Liquid level sensors
Fine level switch
- Model No.
- KML
NEW
Detects with high accuracy the level of fluids including pure water, acids, alkalis and solvents, outputting electrical …
- Industry
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
3, 5-port pilot operated valve
- Model No.
- 4GA/BR・M4GA/BR・MN4GA/BR
NEW
[NEW] Supported communication expanded.
3, 5-port valve with improved environmental performance, safety, reliabil…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
NEW
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Compact flow rate controller RAPIFLOW®
- Model No.
- FCM
NEW
It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…
- Industry
- Shield gas
- N2 purging related products
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Air operated 3, 4, 5-port valves
Master valve
- Model No.
- 4GA/BR・M4GA/BR
3, 5-port master valve with improved environmental performance, safety, reliability, and ease of use.
[Cylinder bore…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and e…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
CKD plus Members Only
Process gas components
Valve for process gas
- Model No.
- LGD
A new variation of valve for process gas that uses a metal diaphragm.
It has been released as a general-purpose prod…
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Air operated valve
- Model No.
- AGD
Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
High-durability valve
High-durability process gas valve for high temperatures
- Model No.
- AGD
A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types a…
- Industry
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
2D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
- N2 purging related products
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- Discontinued Products Only