Product List
Product List
- Out of 11 items,
- item No. 1 to 10
Process gas components
Valve for process gas
- Model No.
- LGD
A new variation of valve for process gas that uses a metal diaphragm.
It has been released as a general-purpose prod…
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Air operated valve
- Model No.
- AGD
Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Manual valve for process gas
- Model No.
- OGD
90° rotation snap action manual valve.
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Manual valve for process gas
- Model No.
- MGD
Manual metal diaphragm valve. A 270° rotating handle opening/closing type.
- Industry
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Vacuum generator
- Model No.
- VG
Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5
- Industry
- Components for chemical gas supply facilities
- Documents / Download
PDF Catalog
Safety Precautions
2D CAD
3D CAD
CKD plus Members Only
Process gas components
Manual valve for process gas
- Model No.
- MGD10V・MGD10V
Discontinued 2011 09 30
【Discontinued model】
Alternative model : Manual valve for process gas MGD Series
- Industry
- Documents / Download
PDF Catalog
CKD plus Members Only
Process gas components
Manual valve for process gas
- Model No.
- OGD10V・OGD20V
Discontinued 2011 09 30
【Discontinued model】
Alternative model : Manual valve for process gas OGD Series
- Industry
- Documents / Download
PDF Catalog
CKD plus Members Only
Process gas components
Air operated valve for process gas
- Model No.
- AGD※※V
Discontinued 2011 09 30
【Discontinued model】
Alternative model : Air operated valve AGD Series
- Industry
- Documents / Download
PDF Catalog
CKD plus Members Only
Process gas components
Air operated valve for process gas
- Model No.
- AGD11・AGD12
Discontinued 2005 09 30
【Discontinued model】
Alternative model : Air operated valve AGD Series
- Industry
- Documents / Download
PDF Catalog
User's Manual
CKD plus Members Only
Process gas components
Vacuum burst valve
- Model No.
- FGL
Discontinued 2008 09 30
【Discontinued model】
- Industry
- Documents / Download
PDF Catalog
CKD plus Members Only
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- Model No.
- Product Category
- Components for high vacuum / special gas
- Process gas components
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- Discontinued Products Only