Product Details
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension especially compact.
[Nozzle diameter] 0.4, 0.5, 0.6 (mm)
[Intake flow rate] 2 to 9.5 (L/min (ANR))
- Industry
- Semiconductor manufacturing process (post-process)
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[Compact and lightweight]
Ideal for restricted mounting space.
Product height is reduced.
[Fast and stable response]
Adopts a direct acting valve for the main valve to realize high-speed and stable response.
(ON/OFF = 5 mm/sec or less)
[Four types of pressure sensors]
Four types of analog output are available for the pressure sensor.
| Model No. | Product name | Nozzle diameter | Remarks |
|---|---|---|---|
| VSN-H | Single unit/high vacuum/medium flow rate | φ0.4, φ0.5, φ0.6 | |
| VSN-E | Single unit/high vacuum/low flow rate | φ0.4, φ0.5, φ0.6 | |
| VSNM-H | Manifold/high vacuum/medium flow rate | φ0.4, φ0.5, φ0.6 | |
| VSNM-E | Manifold/high vacuum/low flow rate | φ0.4, φ0.5, φ0.6 | |
| VSNM-Z | Manifold/mix specifications | - |
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