Product Details

Electro pneumatic regulators

Thin electro pneumatic regulator

Model No.
MEVT

Thin, compact electro pneumatic regulator with reduced wiring.
Ideal for pressure control and fine speed cylinder control in semiconductor and precise processing fields.

Industry

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  • Features
  • Variations

[14 mm thin and 80 g lightweight]
With this high integration type, up to 24 manifold stations can be used.

[Supports reduced wiring]
Supports serial transmission (DeviceNet, CC-Link), centralized terminal block, D sub-connector.

[2 mounting directions]
It can be mounted in two directions, bottom and back.

[High precision / high-speed response]
Repeatability: 0.3% F.S.
Response time: 0.1 sec (no load)

Model No. Product name Pressure control range (MPa)Port size (φ) Remarks
EVTSingle unit0-0.1 4, 6
MEVTManifold0-0.54, 6

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