Product Details

Electro pneumatic regulators

Digital electro pneumatic regulator

Model No.
EVD

Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display function and direct memory function.

Industry
  • Semiconductor manufacturing process (post-process)
  • Special purpose / conveyance

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  • Features
  • Variations

[With digital display]
Digital display mounted to make control status visible at a glance.

[Modular connection]
Module connection to filter / regulator is possible.

[High precision / high-speed response]
Linearity: ±0.3%F.S.
Hysteresis: 0.5% F.S.
Response time: 0.2 sec

[Preset input function]
Up to 8 channels of pressure can be stored in the body and switched by external signals.

[Direct memory function]
External input signal is not required.
Product operation keys can be used to arbitrarily adjust the secondary pressure value.

Model No. Product name Max. flow rate (L/min)Pressure range (kPa) Remarks
EVD-1000Up to 400 ℓ/min60 to 4000 to 900
EVD-3000~1500 ℓ/min700 to 15000 to 900

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