Product Details
Vacuum-related products
Compact vacuum regulator
- Model No.
- VSRVV
Discontinued some variations
- Industry
- Conveyance
- Assembly
- Handling
- Inspection
- Implementation
- Semiconductor manufacturing process (post-process)
Push-lock compact vacuum regulator.

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[One-push lock]
Pressure adjustments can be easily made with one hand. Locking is done with a single push.[50% lighter]
The body is made of resin and the metal materials are made of aluminum. Up to 50% lighter than conventional CKD products.[Copper not used]
SUS and aluminum alloy are used in flow path parts, making it ideal for applications susceptible to copper ions.[Ozone-resistant materials are used as standard]
Special NBR has been adopted. Ozone-resistant materials are used as standard for the valve and diaphragm parts to prevent deterioration.
- Variations
-
- Model No.VSRVV-※Z
- Product name
- Push locking type
- Remarks
- Model No.VSRVV
- Product name
- Pressure adjustment screw・Lock nut type
- Remarks
- Discontinued
2022 10 31Old Catalog