Product Details
Flow sensors / controllers
P5* / P7* Series for small size flow rate sensor RAPIFLOW Miniature inline filter
- Model No.
- FSM-VFM
P5* / P7* Series for cleanrooms
- Industry
Miniature flow sensor for compressed air and nitrogen gas. Due to the small inner volume, the high-speed response at suction confirmation is not affected.
P70 : Prevent dust generation

- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[High-speed response]
5 ms high-speed response has made possible a design once abandoned[Bi-directional measurement]
Bidirectional measurement is possible, making it ideal for suction confirmation.
- Variations