Product Details
Flow sensors / controllers
P5* / P7* Series for Cleanrooms Compact flow rate sensor for gas RAPIFLOW®
- Model No.
- FSM2
Discontinued some variations
P5* / P7* Series for cleanrooms
- Industry
【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.
A small flow sensor for gas with 2-screen 2-color display. It offers two types: integrated and separated display.
P70 : Prevent dust generation
P80 : Oil prohibited
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[Compact even with large flow rate]
Flow rate range: 0.5 to 1,000 ℓ/min
With the 500 and 1000 ℓ/min types, the body size has been reduced by 30% compared to conventional models, attaining high downsizing.
[Straight piping section not required]
As a rectifier mechanism is built in, straight piping sections are not required at either the upstream or downstream sides, allowing it to be installed anywhere.
[Bi-directional measurement]
The flow direction can be randomly set for measurement with the display integrated bi-directional type.
[High-speed response]
The platinum sensor chip manufactured with silicon micromachining realizes the response time of 50 m/sec.[Clean-room specifications]
P70 (anti-dust generation) and P80 (oil-prohibited specifications) are available as standard.
Perfect for semiconductor and liquid crystal manufacturing applications.
- Variations
-
- Model No.FSM2-A
- Product name
- Display separated (for cleanrooms)
- Flow rate range (L/min)
- 0.5 to 1000
- Port size (φ, Rc)
- 4 to 10, 1/8, 1/4, 1/2
- Remarks
- Discontinued
2022 01 31
- Model No.FSM2-N
- Product name
- Display integrated (switch output NPN 2 points, analog output 1 point) (for cleanrooms)
- Flow rate range (L/min)
- 0.5 to 1000
- Port size (φ, Rc)
- 4 to 10, 1/8, 1/4, 1/2
- Remarks
- Discontinued
2022 01 31
- Model No.FSM2-P
- Product name
- Display integrated (switch output PNP 2 points, analog output 1 point) (for cleanrooms)
- Flow rate range (L/min)
- 0.5 to 1000
- Port size (φ, Rc)
- 4 to 10, 1/8, 1/4, 1/2
- Remarks
- Discontinued
2022 01 31
- Model No.FSM2-D
- Product name
- Separated display (for cleanrooms)
- Flow rate range (L/min)
- Port size (φ, Rc)
- Remarks