Product Details
Electro pneumatic regulators
P5* / P7* Series for Cleanrooms Thin electro pneumatic regulator
- Model No.
- MEVT
P5* / P7* Series for cleanrooms
- Industry
Thin, compact electro-pneumatic regulator with reduced wiring.
Ideal for pressure control and fine speed cylinder control in semiconductor and precise processing fields.
P70 : Exhausted treatment
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[14 mm thin and 80 g lightweight]
With this high integration type, up to 24 manifold stations can be used.[Supports reduced wiring]
Supports serial transmission (DeviceNet, CC-Link), centralized terminal block, D sub-connector.[2 mounting directions]
It can be mounted in two directions, bottom and back.[High precision / high-speed response]
Repeatability: 0.3% F.S.
Response time: 0.1 sec (no load)
- Variations
-
- Model No.EVT-P70
- Product name
- Single unit (for cleanrooms)
- Pressure control range (MPa)
- 0 to 0.1
- Port size (φ)
- 4, 6
- Remarks
- Model No.MEVT-P70
- Product name
- Manifold (for cleanrooms)
- Pressure control range (MPa)
- 0 to 0.5
- Port size (φ)
- 4, 6
- Remarks