Product Details
Ejector system
Ejector unit (10.3 mm width)
- Model No.
- VSN・VSNM
- Industry
- Semiconductor manufacturing process (post-process)
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension especially compact.
[Nozzle diameter] 0.4, 0.5, 0.6 (mm)
[Intake flow rate] 2 to 9.5 (L/min (ANR))
- Documents / Download
PDF Catalog
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- Features
[Compact and lightweight]
Ideal for restricted mounting space.
Product height is reduced.[Fast and stable response]
Adopts a direct acting valve for the main valve to realize high-speed and stable response.
(ON/OFF = 5 mm/sec or less)[Four types of pressure sensors]
Four types of analog output are available for the pressure sensor.
- Variations
-
- Model No.VSN-H
- Product name
- Single unit/high vacuum/medium flow rate
- Nozzle diameter
- φ0.4, φ0.5, φ0.6
- Remarks
- Model No.VSN-E
- Product name
- Single unit/high vacuum/low flow rate
- Nozzle diameter
- φ0.4, φ0.5, φ0.6
- Remarks
- Model No.VSNM-H
- Product name
- Manifold/high vacuum/medium flow rate
- Nozzle diameter
- φ0.4, φ0.5, φ0.6
- Remarks
- Model No.VSNM-E
- Product name
- Manifold/high vacuum/low flow rate
- Nozzle diameter
- φ0.4, φ0.5, φ0.6
- Remarks
- Model No.VSNM-Z
- Product name
- Manifold/mix specifications
- Nozzle diameter
- -
- Remarks