Product Details
Direct acting 3-port solenoid valves
Direct acting 3-port valve
- Model No.
- 3QR・3QB・3QE・3QZ
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
- Dialysis monitoring equipment
- Dental equipment
Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)
3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.
[Cylinder bore size: φ6 to φ20]
- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Environmental performance] (3QE / 3QZ Series)
In addition to high durability, stable responsiveness is realized by prevention of malfunction and snagging due to foreign matter.
Suppresses heat generation and reduces electricity.
[Maintainability] (3QE / 3QZ Series)
Upward/lateral common wiring connector and manual override realize ease of use and high maintainability.
Enables continuous energization. (Option)
[Compact and lightweight] (3QB Series)
Valve width 10 mm.
Weight 12.5 g.[3QB low vacuum, positive pressure switching] (3QB Series)
Low vacuum and positive pressure can be freely combined.
Can be customized.
[High performance] (3QR Series)
Universal structure.
Selectable flow rate.
Large flow rate 0.4 d㎥/(s/bar)
Standard: 0.3 d㎥/(s/bar)
High response: 4 ±1 ms / 1.5 ±1 ms (ON/OFF).
- Variations
-
- Model No.3QE
- Product name
- Positive pressure dedicated Single unit
- Piping port position
- Base side piping
- Port size
- M5
- Remarks
- Model No.3QB
- Product name
- Positive / negative pressure switching, large flow rate Single unit
- Piping port position
- Base side piping
- Port size
- M5
- Remarks
- Model No.3QRA
- Product name
- Positive / negative pressure switching, large flow rate Single unit
- Piping port position
- Body piping
- Port size
- M5
- Remarks
- Model No.3QRB
- Product name
- Positive / negative pressure switching, large flow rate Single unit
- Piping port position
- Base side piping
- Port size
- M5
- Remarks
- Model No.M3QE
- Product name
- Positive pressure dedicated Individual wiring manifold
- Piping port position
- Base side piping
- Port size
- M5
- Remarks
- Model No.M3QZ
- Product name
- Positive pressure dedicated Individual wiring manifold
- Piping port position
- Base rear piping
- Port size
- M5
- Remarks
- Model No.M3QB
- Product name
- Positive pressure dedicated Individual wiring manifold
- Piping port position
- Base side piping
- Port size
- M5
- Remarks
- Model No.M3QRA
- Product name
- Positive / negative pressure switching, large flow rate Individual wiring manifold
- Piping port position
- Body piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.M3QRB
- Product name
- Positive / negative pressure switching, large flow rate Individual wiring manifold
- Piping port position
- Base side piping
- Port size
- M5, Rc1/8
- Remarks