Product Details
Direct acting 3-port solenoid valves
Block manifold
- Model No.
- MN3Q
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]
- Documents / Download
Digital Catalog
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Downsizing]
For direct mounting, height 34 mm.
For DIN rail mounting, height 39 mm.
Installable in narrow spaces.
[Panel mounting possible]
The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Flat cable, D sub-connector]
Select from upward and lateral directions for the connector leadout direction.
- Variations
-
- Model No.N3Q0660
- Product name
- Single valve block
- Mounting method
- DIN rail mount
- Port size
- Push-in fitting φ1.8, φ3, φ4, M5
- Remarks
- Model No.MN3Q0660
- Product name
- Block manifold
- Mounting method
- DIN rail mount
- Port size
- Push-in fitting φ1.8, φ3, φ4, M5
- Remarks
- Model No.MT3Q0660
- Product name
- Block manifold
- Mounting method
- Direct mounting method
- Port size
- Push-in fitting φ1.8, φ3, φ4, M5
- Remarks