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Product Details

Pilot operated 3, 4, 5-port solenoid valves

PLC-compatible block manifold

Model No.
MN3E・MN4E
Industry
  • Semiconductor manufacturing process (pre-process)
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • N2 purging related products

More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore size: φ20 to φ40]

Documents / Download

PDF Catalog

Maintenance Parts

Safety Precautions

User's Manual

CKD plus Members Only

Features

[Abundant communication support]
Compatible with EtherNet / IP, EtherCAT, CC-Link, and DeviceNet.
*November 2020, EtherNet/IP added.

[Thin / space saving]
MN3/4E00 Series is the thinnest at 7 mm, contributing to space saving.
MN3/4E 0 series is a 10 mm high performance block manifold not only contributing to space saving, but also offering excellent responsiveness. (N3E0 Series two 3-port valves integrated type: A.B port both 12 ms)

[Environmental conservation]
Lighter weight and reduced material usage by downsizing / energy saving.
We were among the earliest to reduce chemical substances affecting the environment, including lead-free solder and materials compatible with JIG-101A level A.
With energy saving type (Option E), it further reduces power consumption.

[Wide range of fitting variations]
Inch size compatible with push-in fitting, ideal for use in the Western market.
It also supports φ3 and φ1.8 tubes, contributing to space saving of piping.

[Wide array of electrical connections]
Serial transmission corresponding to various connectors and networks are available.
Also supports individual wiring.
Easily pluggable regulator blocks are also available.

[Pursuit of safety]
Exhaust check valve, manual cover to prevent misoperation and air supply filter to prevent entry of foreign matter are provided as standard.

Variations
Model No.MN3E00
Product name
3-port valve
Valve pitch
7 mm
Port size
Push-in fitting φ1.8 to 4, M3
Remarks
Model No.MN3E0
Product name
3-port valve
Valve pitch
10 mm
Port size
Push-in fitting φ1.8 to 6, M5
Remarks
Model No.MN4E00
Product name
4-port valve
Valve pitch
7 mm
Port size
Push-in fitting φ1.8 to 4, M3
Remarks
Model No.MN4E0
Product name
4-port valve
Valve pitch
10 mm
Port size
Push-in fitting φ1.8 to 6, M5
Remarks

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