Product Details
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore size: φ20 to φ40]

- Documents / Download
PDF Catalog
Maintenance Parts
Safety Precautions
User's Manual
Manifold Specifications
CKD plus Members Only
- Features
[Abundant communication support]
Compatible with EtherNet / IP, EtherCAT, CC-Link, and DeviceNet.
*November 2020, EtherNet/IP added.[Thin / space saving]
MN3/4E00 Series is the thinnest at 7 mm, contributing to space saving.
MN3/4E 0 series is a 10 mm high performance block manifold not only contributing to space saving, but also offering excellent responsiveness. (N3E0 Series two 3-port valves integrated type: A.B port both 12 ms)[Environmental conservation]
Lighter weight and reduced material usage by downsizing / energy saving.
We were among the earliest to reduce chemical substances affecting the environment, including lead-free solder and materials compatible with JIG-101A level A.
With energy saving type (Option E), it further reduces power consumption.[Wide range of fitting variations]
Inch size compatible with push-in fitting, ideal for use in the Western market.
It also supports φ3 and φ1.8 tubes, contributing to space saving of piping.[Wide array of electrical connections]
Serial transmission corresponding to various connectors and networks are available.
Also supports individual wiring.
Easily pluggable regulator blocks are also available.[Pursuit of safety]
Exhaust check valve, manual cover to prevent misoperation and air supply filter to prevent entry of foreign matter are provided as standard.
- Variations
-
- Model No.MN3E00
- Product name
- 3-port valve
- Valve pitch
- 7 mm
- Port size
- Push-in fitting φ1.8 to 4, M3
- Remarks
- Model No.MN3E0
- Product name
- 3-port valve
- Valve pitch
- 10 mm
- Port size
- Push-in fitting φ1.8 to 6, M5
- Remarks
- Model No.MN4E00
- Product name
- 4-port valve
- Valve pitch
- 7 mm
- Port size
- Push-in fitting φ1.8 to 4, M3
- Remarks
- Model No.MN4E0
- Product name
- 4-port valve
- Valve pitch
- 10 mm
- Port size
- Push-in fitting φ1.8 to 6, M5
- Remarks