Product Details
Filters
Clean exhaust filter
- Model No.
- FAC
- Industry
Provides direct exhaust within clean rooms. Revolutionary filter / clean exhaust filter that can clean exhaust air used in pneumatic circuits with high accuracy by adopting a hollow fiber membrane structure.

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Provide direct exhaust within clean room]
Cleans exhaust air used in pneumatic circuits with high accuracy by adopting a hollow fiber membrane structure. (Filtration rating 0.01 μm, removal efficiency 99.99% or more)
Just attach to the exhaust port of air components in clean-rooms of class 10 or below for direct exhaust.
The conventional external exhaust is not required at all, and it is possible to drastically reduce the labor, space and cost of piping.[Plug type] (FAC10 Series)
Just insert by hand and mounting is done.
Ideal for regulator vent holes, cylinder exhaust ports, and valve pilot air exhaust ports.[Silencer] (FAC100 / FAC200 Series)
Male thread, with silencer function.
It can be attached directly to the valve port R.[Modular] (FAC3000 Series)
Piping not required when connecting with other modular components (C type /T type brackets, piping adapter, distributor, etc.).
Ideal for common exhaust and large flow exhaust.
- Variations
-
- Model No.FAC10
- Product name
- Clean exhaust filter Plug type
- Port size
- φ4, φ6, φ8, φ10
- Filtration (μm)
- 0.01
- Max. processing flow rate (ℓ/min [ANR])
- 4, 10, 20, 35
- Remarks
- Model No.FAC100
- Product name
- Clean exhaust filter Silencer type
- Port size
- R1/8, R1/4
- Filtration (μm)
- 0.01
- Max. processing flow rate (ℓ/min [ANR])
- 100
- Remarks
- Model No.FAC200
- Product name
- Clean exhaust filter Silencer type
- Port size
- R3/8, R1/2
- Filtration (μm)
- 0.01
- Max. processing flow rate (ℓ/min [ANR])
- 200
- Remarks
- Model No.FAC3000
- Product name
- Clean exhaust filter Modular type
- Port size
- Rc3/8, Rc1/2
- Filtration (μm)
- 0.01
- Max. processing flow rate (ℓ/min [ANR])
- 600
- Remarks