Product Details
Electro pneumatic regulators
Thin electro pneumatic regulator
- Model No.
- MEVT
- Industry
Thin, compact electro pneumatic regulator with reduced wiring.
Ideal for pressure control and fine speed cylinder control in semiconductor and precise processing fields.

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[14 mm thin and 80 g lightweight]
With this high integration type, up to 24 manifold stations can be used.[Supports reduced wiring]
Supports serial transmission (DeviceNet, CC-Link), centralized terminal block, D sub-connector.[2 mounting directions]
It can be mounted in two directions, bottom and back.[High precision / high-speed response]
Repeatability: 0.3% F.S.
Response time: 0.1 sec (no load)
- Variations
-
- Model No.EVT
- Product name
- Single unit
- Pressure control range (MPa)
- 0-0.1
- Port size (φ)
- 4, 6
- Remarks
- Model No.MEVT
- Product name
- Manifold
- Pressure control range (MPa)
- 0-0.5
- Port size (φ)
- 4, 6
- Remarks