Product Details
Electro pneumatic regulators
Digital electro pneumatic regulator
- Model No.
- EVD
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display function and direct memory function.

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[IO-Link compatible]
IO-Link communication enables remote operation from the host, in addition to data collection.[Predictive maintenance]
Operation status can be monitored.[With digital display]
Digital display mounted to make control status visible at a glance.[Modular connection]
Module connection to filter / regulator is possible.[High precision / high-speed response]
Linearity: ±0.3%F.S.
Hysteresis: 0.5% F.S.
Response time: 0.2 sec[Preset input function]
Up to 8 channels of pressure can be stored in the body and switched by external signals.[Direct memory function]
External input signal is not required.
Product operation keys can be used to arbitrarily adjust the secondary pressure value.
- Variations
-
- Model No.EVD-1000
- Product name
- Digital electro pneumatic regulator
- Max. flow rate (L/min)
- 60 to 400
- Pressure range (kPa)
- 0 to 900
- Remarks
- Model No.EVD-3000
- Product name
- Digital electro pneumatic regulator
- Max. flow rate (L/min)
- 700 to 1500
- Pressure range (kPa)
- 0 to 900
- Remarks