Product Details
Electro pneumatic regulators
Electro pneumatic regulator
- Model No.
- EVS2
- Industry
- Semiconductor manufacturing process (post-process)
[NEW] Variation added
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for controlling pilot regulators, pressure and fine speed cylinders in the semiconductor and precision assembling fields.

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Improved performance and variations added]
(1) Resolution up to 0.1%F.S. → up to 0.05%F.S.
(2) Pressure variations -100kPa (negative pressure), 200kPa (medium pressure), and 900kPa (high pressure) added[Compact]
30 x 39 x 57.1 (Width x Height x Length).
As it is compact and lightweight, it contributes to downsizing of equipment.[High precision]
High precision and high-speed response control of fluid pressure using electric signals.
Repeatability: 0.3% F.S.
Resolution 0.1% F.S.
Response time: 0.1 sec (no load)[2-color display of the operational status]
On the 2-color operation indicator, green means the pressure is within the set value and red means the pressure is outside the set value or an error status.[Easy to pipe / wire]
Air piping: Push-in fitting, Electric wiring: M12 fitting is adopted, so piping and wiring work is easy.
- Variations
-
- Model No.EVS2-100
- Product name
- Electro pneumatic regulator
- Pressure control range (MPa)
- 0.001 to 0.1
- Port size (φ)
- 4, 6
- Remarks
- Model No.EVS2-500
- Product name
- Electro pneumatic regulator
- Pressure control range (MPa)
- 0.005 t0 0.5 MPa
- Port size (φ)
- 4, 6
- Remarks
- Model No.EVS2-10V
- Product name
- Electro pneumatic regulator
- Pressure control range (MPa)
- -0.0053 to -0.0912
- Port size (φ)
- 4,6
- Remarks
- Model No.EVS2-200
- Product name
- Electro pneumatic regulator
- Pressure control range (MPa)
- 0.002 to 0.2
- Port size (φ)
- 4,6
- Remarks
- Model No.EVS2-900
- Product name
- Electro pneumatic regulator
- Pressure control range (MPa)
- 0.009 to 0.9
- Port size (φ)
- 4,6
- Remarks