Product Details
Integrated gas supply system
Integrated gas supply system
- Model No.
- IAGD5
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical gas supply facilities
A process gas supply system that takes up less space and offers improved maintainability.
We do it all based on the processes you need, from design to manufacturing.
1.125 inch, W seal supported.
- Documents / Download
Digital Catalog
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[Integrated unit]
The process gas supply line has been compactly integrated using standardized parts.
Achieves an ideal flow path that enables high-speed substitution of process gas and inert gas.
We deliver after designing, assembling and testing, reducing the labor required from the customer.
- Variations
-
- Model No.IAGD5
- Product name
- Integrated gas supply system
- Content
- -
- Size
- -
- Connection
- W seal
- Remarks
- Model No.MAGD5-R
- Product name
- Components for integrated gas supply system
- Content
- Air operated valve
- Size
- 1.125inch
- Connection
- -
- Remarks
- Model No.MMGD5-R
- Product name
- Components for integrated gas supply system
- Content
- Manual valve
- Size
- 1.125inch
- Connection
- -
- Remarks
- Model No.MFGD5
- Product name
- Components for integrated gas supply system
- Content
- Flow rate adjusting valve
- Size
- 1.125inch
- Connection
- -
- Remarks
- Model No.MCPG5
- Product name
- Components for integrated gas supply system
- Content
- Check valve
- Size
- 1.125inch
- Connection
- -
- Remarks