Product Details
High vacuum components
Vacuum pressure control system
- Model No.
- IAVB
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables various processes.

- Documents / Download
PDF Catalog
Safety Precautions
CKD plus Members Only
- Features
[Slow exhaust control is possible]
Compared with general ON / OFF vacuum valves and two-stage exhaust vacuum valves, it enables gradual exhaust at a constant rate.[Pressure control function added]
A pressure control function has been added to the highly reliable vacuum valve.
Regulator and variable leak are not required for pressure adjustment in vacuum.
The poppet valve system enables fully closed operation, a problem for butterfly valves, through the O-ring sealing structure.[Easy maintenance]
The valves and wiring components can be maintained separately.
- Variations
-
- Model No.IAVB※17
- Product name
- Vacuum pressure control system
- Connection
- NW16, 25, 40, 50
- Remarks
- Model No.IAVB-CONT
- Product name
- Controller for IAVB
- Connection
- -
- Remarks