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Product Details

High vacuum components

Vacuum pressure control system

Model No.
IAVB
Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)

While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables various processes.

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Digital Catalog

PDF Catalog

Safety Precautions

CKD plus Members Only

Features

[Slow exhaust control is possible]
Compared with general ON / OFF vacuum valves and two-stage exhaust vacuum valves, it enables gradual exhaust at a constant rate.

[Pressure control function added]
A pressure control function has been added to the highly reliable vacuum valve.
Regulator and variable leak are not required for pressure adjustment in vacuum.
The poppet valve system enables fully closed operation, a problem for butterfly valves, through the O-ring sealing structure.

[Easy maintenance]
The valves and wiring components can be maintained separately.

Variations
Model No.IAVB※17
Product name
Vacuum pressure control system
Connection
NW16, 25, 40, 50
Remarks
Model No.IAVB-CONT
Product name
Controller for IAVB
Connection
-
Remarks

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