Product Details
High vacuum components
Electric vacuum valve
- Model No.
- EVB
Discontinued 2021 03 31
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
【Discontinued model】
Alternative model : IAVB Series
Electric vacuum valve which achieves diverse conductance by motorizing the valve opening.

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Safety Precautions
CKD plus Members Only
- Features
[Opening set in 30 points motor drive]
Opening adjustment with motor drive by external signal.
Minimum pitch 0.15 mm (for NW25).
Ideal for simple conductance variable systems and automation of vacuum control.[Opening monitoring function, various signal output functions]
Current opening is monitored with built-in encoder.
Operation completion signal of valve open/closed status, alarm output function equipped for peace of mind.
- Variations
-
- Model No.EVB※17
- Product name
- Electric vacuum valve
- Connection
- NW25, 40, 50
- Remarks
- Discontinued
2021 03 31Old Catalog