Product Details
Process gas components
Air operated valve
- Model No.
- AGD
- Industry
- Components for chemical gas supply facilities
- Components for chemical liquid supply facilities
- Semiconductor manufacturing process (pre-process)
- N2 purging related products
Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types.
- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
CKD plus Members Only
- Features
[Standard]
Durability: 1 million cycles (actual value: 4 million cycles)
Supports integrated gas supply systems (1.5inch, 1.125inch)[Improved inner seal performance]
Reduced particle generation is achieved with optimal seal structure and improved surface roughness.
- Variations
-
- Model No.AGD0※R-4RM
- Product name
- Air operated valve for process gas
- Connection
- 1/4”JXR male fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD0※R-4R
- Product name
- Air operated valve for process gas
- Connection
- 1/4”JXR female fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD1※R-4RM
- Product name
- Air operated valve for process gas
- Connection
- 1/4”JXR male fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD1※R-4R
- Product name
- Air operated valve for process gas
- Connection
- 1/4”JXR female fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD1※R-4S
- Product name
- Air operated valve for process gas
- Connection
- 1/4”double barbed fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD2※R-6RM
- Product name
- Air operated valve for process gas
- Connection
- 3/8”JXR male fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD2※R-6R
- Product name
- Air operated valve for process gas
- Connection
- 3/8”JXR female fitting
- Actuation
- NC, NO
- Remarks
- Model No.AGD2※R-6S
- Product name
- Air operated valve for process gas
- Connection
- 3/8”double barbed fitting
- Actuation
- NC, NO
- Remarks