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Product Details

High-durability valve

High-durability process gas valve for high temperatures

Model No.
AGD
Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

A valve for process gas that offers the high durability needed to keep up with advances in refinement.
Three types are available to meet your needs.

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Features

[AGD-HD Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves

[AGD-HDF Series]
Durability: 10 million cycles guaranteed (actual value: 30 million cycles)
High temperature support: Up to 200°C
Supports integrated gas supply systems (1.5 inch, 1.125 inch)
Supports single valves
Equipped with stable response actuator

[AGD21R-A Series]
Durability: 30 million cycles guaranteed (actual value: 100 million cycles)
Fluid temperatures of 150 to 200°C supported
Supports integrated gas supply systems (1.5 inch)
Equipped with stable response actuator
High Cv: 0.4 or more

Variations
Model No.AGD※※R-HD
Product name
High-durability process gas valve
Fluid temperature
5 to 80°C
Actual value
30 million times and over
Remarks
Model No.AGD※※R-HDF
Product name
High temperature/high durability valve
Fluid temperature
20 to 200°C
Actual value
30 million times and over
Remarks
Model No.AGD21R-A
Product name
High temperature/high durability valve
Fluid temperature
150 to 200°C
Actual value
100 million plus cycles
Remarks

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