Product Details
Budding products【Special-order product】
Direct acting 3-port valve【Special-order product】
- Model No.
- 3QR
NEW
- Industry
- Semiconductor manufacturing process (pre-process)
- Semiconductor manufacturing process (post-process)
- Oxygen concentrator
Compact direct acting 3-port valve.
Special specification products compatible with continuous energization, self-holding, and reduced wiring.
(Three types of products are listed on a single product page.)
[Cylinder bore size: ø6 to ø20]

- Documents / Download
PDF Catalog
CKD plus Members Only
- Features
[Continuous energization specifications]
Supports continuous energization with reduced power consumption.Ideal specifications for air operated valve operation and return to origin during power outages.
[Self-holding type]
Capable of holding the switching position even during power outages, such as for vacuum switching.In addition to the standard NPN, PNP specifications have been added as special specification products.
[Reduced wiring specifications]
Compatible with centralized terminal blocks, D-sub connectors, and flat cables.
Compatible with standard specifications of 3QRA/B series and continuous energization specifications.*Self-holding specifications (NPN/PNP) are not compatible with reduced wiring specifications.
- Variations
-
- Model No.3QRB110
- Product name
- Single valve (continuously energized specifications)【Specal-order product】
- Piping port position
- Sub-plate piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.M3QRB110
- Product name
- Individual wiring manifold (continuously energized specifications)【Special-order product】
- Piping port position
- Sub-plate piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.3QRB120
- Product name
- Single valve (self-hold)【Special-order product】
- Piping port position
- Sub-plate piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.M3QRB120
- Product name
- Individual wiring manifold (self-hold)【Special-order product】
- Piping port position
- Sub-plate piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.M3QRA110-T
- Product name
- Reduced wiring block manifold【Special-order product】
- Piping port position
- Body piping
- Port size
- M5, Rc1/8
- Remarks
- Model No.M3QRB110-T
- Product name
- Reduced wiring block manifold【Special-order product】
- Piping port position
- Sub-plate piping
- Port size
- M5, Rc1/8
- Remarks